CTR - COMPACT THERMAL REACTOR
The all new CTR (Compact Thermal Reactor) is available in Europe. The CTR is being widely accepted into both the R&D and pilot production environment and is also finding a home in production houses where floor space and heat load limitations are strict. Batch sizes are typically getting smaller across the board with smaller chips and different devices meaning more are fitting onto each wafer.
The CTR utilises proven technology and can also be stacked up to 4 tools to really minimise floor space.