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DNS

ID MODEL DESCRIPTION
419007 60A Wafer Scrub Wafer Scrub
130070 SKW-80A-BVPE Photoresist Coater/Developer 1 Coat 2 Develop WEE for 200mm Wafers Photoresist Coater/Developer 1 Coat 2 Develop WEE for 200mm Wafers
132249 LA820 Rapid Thermal Processor Rapid Thermal Processor
132250 SKW-80A-AVPE Track (3D) Track (3D)
132251 SCW-80A-AVQ Track Track
132252 80B Track (2C3D) Track (2C3D)
132253 80B Track (2C) Track (2C)
132254 80B Track (1C2D) Track (1C2D)
132255 SKW-80A-AVPE Track (1C2D) Track (1C2D)
132256 SKW-80A-AVPE Track (1C2D) Track (1C2D)
132257 SK-80B-BVPF Track Track
132258 SSW-80A-A Scrubber (Part machine) Scrubber (Part machine)
132259 SS-W80A-A Scrubber?D-SONIC (4B) Scrubber?D-SONIC (4B)
132260 SS-W80A-AR Scrubber?D-SONIC (3F1B) Scrubber?D-SONIC (3F1B)
502011 200W DNS INTERFACE DNS INTERFACE
502048 FL820L DRYER DRYER
502085 SK-80B COAT/DEVELOP COAT/DEVELOP
502087 SD-80R DEVELOPER DEVELOPER
502088 SC-80R COAT COAT
502089 SD-80R DEVELOPER DEVELOPER
502090 SC-RW8 COAT COAT
502091 SC-80R COAT COAT
502094 SC-80R CHEMICAL CABINET CHEMICAL  CABINET
502113 80B COAT/DEVELOP COAT/DEVELOP
501031 SK-80BW-AVP Single unit (No I/F) Single unit (No I/F)
501044 SU-3100 4 chamber HF/HNO3DHFAPM 4 chamber HF/HNO3DHFAPM