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Ebara

ID MODEL DESCRIPTION
134039 FREX300 Tungsten CMP Tungsten CMP
134040 FREX300 Tungsten CMP Tungsten CMP
134192 FREX300 Poly/STI CMP Poly/STI CMP
134193 FREX300 Poly/STI CMP Poly/STI CMP
134194 FREX300 Poly/STI CMP Poly/STI CMP
134195 FREX300 Poly/STI CMP Poly/STI CMP
134196 FREX300 Poly/STI CMP Poly/STI CMP
134197 FREX300 Tungsten CMP Tungsten CMP
134198 FREX300 Tungsten CMP Tungsten CMP