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EQUIPE

ID MODEL DESCRIPTION
130077 ATM-104 Wafer Handling Robot for up to 200mm Wafers Wafer Handling Robot for up to 200mm Wafers
130078 ESC-212B Rev. 4.0 Robot Controller for up to 200mm Wafers Robot Controller for up to 200mm Wafers
130079 PRE-3190 Wafer Prealigner for up to 200mm Wafers Wafer Prealigner for up to 200mm Wafers