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KLA Tencor

ID MODEL DESCRIPTION
418001 2131 KLA 2131 KLA 2131
418003 2608 KLA 2608 KLA 2608
418006 2608 KLA2608 Inspection station KLA2608 Inspection station
418007 NC110 Tencor Omnimap 110 Tencor Omnimap 110
418017 KLA5015 KLA5015 registration measurement tool KLA5015 registration  measurement tool
418018 KLA2131 JKLA2131 Defrect detection system. JKLA2131 Defrect detection system.
419015 FLX5400 Film Stress Measurement Film Stress Measurement
419016 Surfscan 8010 AIT Defect Inspection Defect Inspection
421046 KLA AIT2 for / 300 mm KLA Tencor KLA AIT2 for / 300 mm KLA Tencor KLA AIT2 for  / 300 mm
130139 AlphaStep 300 Profilometer Profilometer
130140 CRS-1010 Offline Review Station forup to 200mm Wafers Offline Review Station forup to 200mm Wafers
130141 FT-750 Film Thickness Inspection System Film Thickness Inspection System
130142 Surfscan AIT Patterned Wafer Surface Inspection Tool with Autofocus Review Patterned Wafer Surface Inspection Tool with Autofocus Review
132362 Alpha Step 500 Profilometer Profilometer
132363 FLX-2320 Film stress measurement Film stress measurement
132364 5200XP Inspection OVERLAY Inspection OVERLAY
132365 5200 Inspection OVERLAY Inspection OVERLAY
132366 2132 (mainbody only) INSPECTION UNIT INSPECTION UNIT
132367 2135 Defect Review Defect Review
132368 2135 Defect Review Defect Review
132369 2135 Defect Review Defect Review
132370 2350 High-Resolution Imaging Inspection High-Resolution Imaging Inspection
132371 2350 High-Resolution Imaging Inspection High-Resolution Imaging Inspection
132372 5100 Critical Dimension Overlay Critical Dimension Overlay
132373 5100 Critical Dimension Overlay Critical Dimension Overlay
132374 AIT I Patterned Wafer Inspection Patterned Wafer Inspection
132375 AIT I Patterned Wafer Inspection Patterned Wafer Inspection
132376 SFS7200 INSPECTION UNIT INSPECTION UNIT
132377 SFS7200 INSPECTION UNIT INSPECTION UNIT
132378 SFS7200 INSPECTION UNIT INSPECTION UNIT
132379 2551X Data analysis station Data analysis station
132380 2608 Wafer inspection Wafer inspection
132381 AIT Particle Review Particle Review
132382 AIT Particle Review Particle Review
132383 AIT Particle Review Particle Review
132384 M-GAGE 300 Thickness measurement Thickness measurement
132385 M-GAGE 200 Thickness measurement Thickness measurement
132386 P1 profiler profiler
132387 P2 profiler profiler
132388 P2H profiler profiler
132389 P10 profiler profiler
132390 PROMETRIX RS35(TC) Auto Type Resistivity Resistivity
132391 PROMETRIX RS55(TC) Auto Type Resistivity Resistivity
132392 PROMETRIX RS55(TC) Auto Type Resistivity Resistivity
132393 PROMETRIX RS55(TC) Auto Type Resistivity Resistivity
132394 PROMETRIX RS75 ( Manual Type) Resistivity Resistivity
132395 THERMA-WAVE OP 2600 5M01-03 OPTI-PROBE OPTI-PROBE
132396 THERMA-WAVE OP 2600 DUV OPTI-PROBE OPTI-PROBE
132397 THERMA-WAVE OP 2600 OPTI-PROBE OPTI-PROBE
132398 THERMA-WAVE OP 2600 OPTI-PROBE OPTI-PROBE
132399 THERMA-WAVE OP 2600 OPTI-PROBE OPTI-PROBE
132400 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132401 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132402 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132403 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132404 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132405 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132406 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132407 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132408 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132409 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132410 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
132411 THERMA-WAVE OP 2600B OPTI-PROBE OPTI-PROBE
502022 2122 METROLOGY METROLOGY
502034 2552X METROLOGY METROLOGY
502086 ULTRA METROLOGY METROLOGY
501004 ES20 ES20 ES20
501005 AIT X+ Inspection tool Inspection tool
501011 KLA FLX Call for details Call for details
501018 KLA AMRAY 4200 Inspection System Inspection System
501020 Optiprobe model 2600DUV Inspection System Inspection System
501045 AITFUSION?XUV Defect Inspection Defect Inspection
501047 Surfscan-SP2 Defect Inspection Defect Inspection
501048 ARELIS Thickness Measurement Thickness Measurement