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LAM Research

ID MODEL DESCRIPTION
132177 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
132178 2300 Exelan Flex EX Lite Dielectric Etch Dielectric Etch
132179 2300 Exelan Flex EX Lite Dielectric Etch Dielectric Etch
132180 2300 Exelan Flex EX Lite - Chamber Only Dielectric Etch Dielectric Etch
132181 2300 Exelan Flex EX+ Dielectric Etch Dielectric Etch
132182 2300 Exelan Flex EX Lite Dielectric Etch Dielectric Etch
132183 2300 Exelan Flex EX+ Dielectric Etch Dielectric Etch
132184 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
132185 2300 Exelan Flex EX Lite Dielectric Etch Dielectric Etch
132186 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
132187 2300 Syndion-C TSV Polysilicon Etch Polysilicon Etch
132188 2300 Syndion TSV Polysilicon Etch Polysilicon Etch
132189 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
132390 Rainbow 4420 Multi-Process Etch Multi-Process Etch
132391 2300 Versys KIYO Poly Polysilicon Etch Polysilicon Etch
132392 2300 Exelan Flex - Chamber Only Dielectric Etch Dielectric Etch
132393 2300 Exelan Flex FX+ Dielectric Etch Dielectric Etch
132394 2300 Versys KIYO Poly - Chamber Only Polysilicon Etch Polysilicon Etch