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LAM Research

ID MODEL DESCRIPTION
111320 2300 Exelan Flex Dielectric Etch Dielectric Etch
111321 Rainbow 4420 Polysilicon Etch Polysilicon Etch
111322 2300 Exelan Flex FX+ Dielectric Etch Dielectric Etch
111323 2300 Versys KIYO Poly - Chamber Only Polysilicon Etch Polysilicon Etch
111324 2300 Exelan Flex EX Dielectric Etch Dielectric Etch
111325 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
111326 2300 Versys KIYO Poly - Chamber Only Polysilicon Etch Polysilicon Etch
111327 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
111328 2300 Exelan Flex EX+ Dielectric Etch Dielectric Etch
111329 2300 KIYO 45 Poly - Chamber Only Polysilicon Etch Polysilicon Etch
111330 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
111331 2300 Exelan Flex EX+ Dielectric Etch Dielectric Etch
111332 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
111333 2300 Exelan Flex EX Dielectric Etch Dielectric Etch
111334 2300 KIYO EX Poly - Chamber Only Polysilicon Etch Polysilicon Etch
111335 2300 Exelan Flex 45 Dielectric Etch Dielectric Etch
111336 2300 Versys KIYO 45 Polysilicon Etch Polysilicon Etch