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Novellus

ID MODEL DESCRIPTION
419026 Concept 1 BPSG Deposition BPSG Deposition
419027 Concept 2 HPD Deposition HPD Deposition
132508 Concept one TEOS TEOS
132509 Concept one TEOS TEOS
132510 Concept one Tungsten Tungsten
132511 Concept one Tungsten Tungsten
132512 Concept one SIN (6inFAB) SIN (6inFAB)
132513 Concept one SIN (6inFAB) SIN (6inFAB)
132514 Concept one PE CVD PE CVD
132515 Concept one TEOS TEOS
132516 Concept one CVD CVD
132517 Concept-2 Dual Altus CVD CVD
132518 CONCEPT ? ALTUS CVD-W System CVD-W System
132519 SPEED CONCEPT 3 XT XT
132520 SPEED CONCEPT 3 NEXT NEXT
132521 SPEED C2 Call for details Call for details
132522 SPEED C2 Call for details Call for details
132523 SPEED C2 Call for details Call for details
132524 SPEED C2 Call for details Call for details
132525 SPEED C2 Call for details Call for details
132526 SPEED C2 Triple Chamber PEIFFER 2101 Triple Chamber PEIFFER 2101
132527 SPEED C2 ONLY DLCM 1 CHAMBER SSD ONLY DLCM 1 CHAMBER SSD
132528 SPEED C2 Triple Chamber MAG 2200 Triple Chamber MAG 2200
132529 SPEED C2 Triple Chamber MAG 2000 Triple Chamber MAG 2000
132530 SPEED C2 Triple Chamber CH A MAG2200 CH BC 2000 Triple Chamber CH A MAG2200 CH BC 2000
132531 SPEED C2 Triple Chamber MAG 2000 Triple Chamber MAG 2000
132532 SPEED C2 Triple Chamber MAG 2200 Triple Chamber MAG 2200
132533 SPEED C2 Triple Chamber MAG 2200 Triple Chamber MAG 2200
132534 SPEED C2 Triple Chamber MAG 2000 Triple Chamber MAG 2000
132535 SPEED C2 Triple Chamber MAG 2000 Triple Chamber MAG 2000
132536 676 CMP System Polisher CMP System Polisher
132537 676 CMP System Polisher CMP System Polisher
132538 L3500 ETCH ETCH
502009 CONCEPT ONE CVD CVD
502020 PEP IRIDIA ASHER ASHER
502024 CONCEPT ONE CVD CVD
501006 Gasonic Gasonic 2000ll Gasonic 2000ll
501007 Gasonic Gasonic 2000ll Gasonic 2000ll
501008 Gasonic Gasonic 2000ll Gasonic 2000ll