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SDI

ID MODEL DESCRIPTION
130236 FAaST-230 Wafer Characterization Tool for up to 200mm Wafers Wafer Characterization Tool for up to 200mm Wafers
130237 FAaST-330 Dielectric Characterization Tool with COCOS & Epi-t for up to 300mm Wafers Dielectric Characterization Tool with COCOS & Epi-t for up to 300mm Wafers
130238 SPV Station 1010 Surface Photo Voltage Tester Surface Photo Voltage Tester
130239 SPV-300 Surface Photo Voltage Tester for up to 300mm Wafers Surface Photo Voltage Tester for up to 300mm Wafers