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Semitool

ID MODEL DESCRIPTION
418008 VTP1500 Dry Oxide 1050C O2/HCL 100 wafer max Dry Oxide 1050C  O2/HCL 100 wafer max
418009 VTP1500 Dry Oxide 1050C O2/HCL 100 wafer max Dry Oxide 1050C O2/HCL 100 wafer max
418011 VTP1500 LPCVD Nitride DCS/HCl/NH3 100wafer 200mm LPCVD Nitride DCS/HCl/NH3 100wafer 200mm
418012 VTP1500 LPCVD Teos Oxide Schumaker Teos Source 75 wafer LPCVD Teos Oxide Schumaker Teos Source 75 wafer
419029 870 Wafer Rinse/Spin Dry Wafer Rinse/Spin Dry
419030 870 Wafer Rinse/Spin Dry Wafer Rinse/Spin Dry
419031 870 Wafer Rinse/Spin Dry Wafer Rinse/Spin Dry
419032 870 Wafer Rinse/Spin Dry Wafer Rinse/Spin Dry
499002 260 Spin rinse dryer (SRD) - 4 bolt rotor for 125mm Spin rinse dryer (SRD) - 4 bolt rotor for 125mm
132573 WST305M Spin Dry Spin Dry
132574 EO212PM Cu PLTNG Cu PLTNG
502036 EQUINOX PLATER PLATER
502054 SST WET PROCESS WET PROCESS
501009 LT210 EPC LT210 Cu EPC LT210 Cu
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