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TEL

ID MODEL DESCRIPTION
419034 Unity II / U2e-855DD Dry Etch Dry Etch
421082 TEL Trias TI/TiN-ALD for / 300 mm TEL TEL Trias TI/TiN-ALD for / 300 mm TEL TEL Trias TI/TiN-ALD for  / 300 mm
421083 OfenTel Minibatch (NITRID) for / 300 mm TEL OfenTel Minibatch (NITRID) for / 300 mm TEL OfenTel Minibatch (NITRID) for  / 300 mm
421084 OfenTel Minibatch (OXID) for / 300 mm TEL OfenTel Minibatch (OXID) for / 300 mm TEL OfenTel Minibatch (OXID) for  / 300 mm
421085 TEL 303i furnace for LPCVD poly (undoped) TEL TEL 303i furnace for LPCVD poly (undoped) TEL TEL 303i furnace for LPCVD poly (undoped)
421086 TEL 303i furnace for LPCVD poly (undoped) for TEL TEL 303i furnace for LPCVD poly (undoped) for TEL TEL 303i furnace for LPCVD poly (undoped) for
421087 TEL 303i furnace for SOG anneal TEL TEL 303i furnace for SOG anneal TEL TEL 303i furnace for SOG anneal
421088 TEL 303i LPCVD poly TEL TEL 303i LPCVD poly TEL TEL 303i LPCVD poly
421089 TEL 303i LPCVD poly TEL TEL 303i LPCVD poly TEL TEL 303i LPCVD poly
421090 TEL Certas WING for / 300 mm TEL TEL Certas WING for / 300 mm TEL TEL Certas WING for  / 300 mm
421091 TEL Clean Track Mk7 N TEL TEL Clean Track Mk7 N TEL TEL Clean Track Mk7 N
421092 TEL Clean Track Mk7 N TEL TEL Clean Track Mk7 N TEL TEL Clean Track Mk7 N
421093 TEL Trias TI/TiN-ALD for / 300 mm TEL TEL Trias TI/TiN-ALD for / 300 mm TEL TEL Trias TI/TiN-ALD for  / 300 mm
132601 855 DD Etcher Etcher
132602 TE8500 Etcher Etcher
132603 TE8500 Etcher Etcher
132604 TE8500 Etcher Etcher
132605 TE8500 Etcher Etcher
132606 SCCM-TE(JIN) CLN CLN
132607 Mark 7 Clean Track Clean Track
132608 Mark 7 Clean Track Clean Track
132609 Mark 7 Clean Track Clean Track
132610 Mark 7 Clean Track Clean Track
132611 Act 12 Clean Track Clean Track
132612 Act 12 Clean Track Clean Track
132613 P-8 AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132614 P-8 AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132615 P-8XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132616 P-8XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132617 P-8XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132618 P-12XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132619 P-12XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132620 P-12XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132621 P-12XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132622 P-12XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132623 P-12XL AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132624 P-12XLM AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132625 P-12XLM AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132626 P-12XLM AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132627 P-12XLM AUTOMATIC WAFER PROBER AUTOMATIC WAFER PROBER
132628 EXPEDIUS Surface Preparation system Surface Preparation system
132629 EXPEDIUS Surface Preparation system Surface Preparation system
132630 ALPHA-303i Call for details Call for details
132631 ALPHA-303i Call for details Call for details
132632 ALPHA-303i TEOS Vertical LPCVD Furnace Vertical LPCVD Furnace
132633 ALPHA 8SE HIGH TEMP PYRO ANNEAL HIGH TEMP PYRO ANNEAL
132634 ALPHA 8SE N2 LP ANNEAL N2 LP ANNEAL
132635 Telformula optimal thermal processing optimal thermal processing
501012 Unity 2 855DD Call for details Call for details
501026 Clean Track Act 8 Call for details Call for details
501028 UNITY M 85TD Call for details Call for details
501032 ALPHA-8SE-ZANRS Cu Anneal SMIF(TEL) Cu Anneal SMIF(TEL)
501033 ACT-8 UV exposure unit / 2 body 2 CT 1 DEV UV exposure unit / 2 body 2 CT 1 DEV
501035 ACT-8(1body) Inline tool Adhesion 1 Coater 2 Dev 2 HHP 1 LHP 7 CHP 4 CP 5 Inline tool Adhesion 1 Coater 2 Dev 2 HHP 1 LHP 7 CHP 4 CP 5