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Tokyo Electron Ltd.

ID MODEL DESCRIPTION
111421 CLEAN TRACK LITHIUS Pro Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111422 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111423 Telius SP-305 SCCM Dielectric Etch Dielectric Etch
111424 Telius 305 SCCM Dielectric Etch Dielectric Etch
111425 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111426 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111427 TELINDY IRAD ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111428 Trias W MOCVD MOCVD
111429 Trias W MOCVD MOCVD
111430 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111431 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111432 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111433 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111434 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111435 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111436 Telius SP-305 SCCM Dielectric Etch Dielectric Etch
111437 Tactras Vigus Dielectric Etch Dielectric Etch
111438 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111439 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111440 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111441 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111442 ALPHA-303i Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111443 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111444 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111445 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111446 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111447 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111448 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111449 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111450 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111451 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111452 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111453 ALPHA-303i Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111454 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111455 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111456 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111457 TELINDY Plus Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111458 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111459 TELINDY Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111460 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111461 TELINDY Plus Vertical Diffusion Furnace Vertical Diffusion Furnace
111462 Trias W MOCVD MOCVD
111463 TELINDY Plus Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111464 Expedius Batch Wafer Processing Batch Wafer Processing
111465 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111466 TELINDY Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111467 TELINDY Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111468 TELINDY Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111469 TELINDY Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111470 CLEAN TRACK LITHIUS i+ Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111471 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111472 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111473 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111474 Tactras Vigus Dielectric Etch Dielectric Etch
111475 TELINDY Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111476 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111477 TELINDY Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111478 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111479 Expedius Batch Wafer Processing Batch Wafer Processing
111480 UW200Z Batch Wafer Processing Batch Wafer Processing
111481 ALPHA-303i Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111482 CLEAN TRACK ACT 8 Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111483 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111484 ALPHA-303i Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111485 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111486 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111487 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111488 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111489 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111490 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111491 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111492 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111493 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111494 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111495 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111496 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111497 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111498 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111499 UW300Z Batch Wafer Processing Batch Wafer Processing
111500 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111501 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111502 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111503 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111504 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111505 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111506 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111507 TELINDY IRAD ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111508 TELINDY Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111509 TELINDY Plus Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111510 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111511 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111512 TELINDY Plus Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111513 TELINDY Plus Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111514 TELINDY Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111515 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111516 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111517 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111518 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111519 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111520 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111521 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111522 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111523 Expedius+ Batch Wafer Processing Batch Wafer Processing
111524 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111525 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111526 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111527 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111528 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111529 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111530 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111531 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111532 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111533 TELINDY Doped Poly Vertical LPCVD Furnace Vertical LPCVD Furnace
111534 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111535 Trias Ti/TiN Chamber Parts/Peripherals Parts/Peripherals
111536 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111537 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111538 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111539 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111540 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111541 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111542 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111543 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111544 Expedius+ Batch Wafer Processing Batch Wafer Processing
111545 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111546 TELINDY ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111547 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111548 Trias Ti/TiN Chamber Parts/Peripherals Parts/Peripherals
111549 Trias Ti/TiN Chamber Parts/Peripherals Parts/Peripherals
111550 Trias Ti/TiN Chamber Parts/Peripherals Parts/Peripherals
111551 TELINDY Vertical LPCVD Furnace Vertical LPCVD Furnace
111552 Parts Parts/Peripherals Parts/Peripherals
111553 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111554 CLEAN TRACK LITHIUS Coat only Track Coat only Track
111555 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111556 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111557 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111558 CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer) Multi Block (Resist Coater/Developer)
111559 Expedius-i Batch Wafer Processing Batch Wafer Processing
111560 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111561 TELINDY Plus Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111562 NEXX Apollo Sputtering System Sputtering System
111563 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111564 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111565 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111566 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111567 ALPHA-303i Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111568 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111569 NEXX Apollo Sputtering System Sputtering System
111570 Certas WING Single Wafer Processing Single Wafer Processing
111571 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111572 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111573 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111574 ALPHA-303i Anneal Vertical Anneal Furnace Vertical Anneal Furnace
111575 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111576 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111577 Telius 305 SCCM Dielectric Etch Dielectric Etch
111578 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111579 Telius SP-305 SCCM Dielectric Etch Dielectric Etch
111580 TELINDY Plus ALD High-K Vertical Furnace - Other Vertical Furnace - Other
111581 TELINDY Plus Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111582 TELINDY Plus Oxide Vertical LPCVD Furnace Vertical LPCVD Furnace
111583 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111584 Triase+ Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111585 TELFORMULA Nitride Vertical LPCVD Furnace Vertical LPCVD Furnace
111586 Trias Ti/TiN Chamber Parts/Peripherals Parts/Peripherals
111587 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111588 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111589 Trias W MOCVD MOCVD
111590 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111591 Tactras Vesta Polysilicon Etch Polysilicon Etch
111592 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111593 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111594 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111595 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111596 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111597 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111598 TELFORMULA ALD High-K Vertical LPCVD Furnace Vertical LPCVD Furnace
111599 CLEAN TRACK LITHIUS Coat only Track Coat only Track
111600 Triase+ EX-II Plus Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111601 Telius SP 305 DRM Dielectric Etch Dielectric Etch
111602 NT333 ALD (Atomic Layer Deposition) ALD (Atomic Layer Deposition)
111603 Trias Ti/TiN Metal CVD (Chemical Vapor Deposition) Metal CVD (Chemical Vapor Deposition)
111604 Telius SP 305 DRM Dielectric Etch Dielectric Etch