SURFSCAN 6200
- Substrate/Sizes: 2" to 8" wafer capable
- Thickness: SEMI Standard Wafer Thickness ( thin wafers may be insufficiently flat if they bend)
- Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
- Defect Sensitivity: 0.12 Micrometer Diameter PSL Sphere Equivalent with greater than 95 percent Capture Rate
- Repeatability: Count Repeatability Error less than 1.0 percent at 1 Standard Deviation (Mean Count greater than 500, 0.364 mm dia. Latex Spheres).
- Haze Sensitivity 0.1ppm
- Haze Resolution 0.01 ppm
- X/Y coordinates(optional) - Accuracy: Count Accuracy better than 99 percent
- Throughput: 70 wph (200 mm)
- Contamination: Less than 0.005 Particles/cm2 greater than 0.15 mm dia. per single pass
- Cassette Handling: Single Puck Wafer Handling from two Cassettes
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength ( life 12-18 months approx
- Operator Interface: Mouse and/or Dedicated User Keypad. Windows 98 operating system.
- Height: 168cm (66in)
- Width: 75 cm (29.5 in.)
- Depth: 77 cm (30.25 in.)
- Instrument: 240 kg (530 lb)
