Tokyo Electron Ltd.

ALPHA-303i Anneal

Vertical Anneal Furnace

ALPHA-303i Anneal

Vertical Anneal Furnace

CLEAN TRACK ACT 12

Single Block (Resist Coater/Developer)

CLEAN TRACK ACT 12

Single Block (Resist Coater/Developer)

CLEAN TRACK ACT 12

Single Block (Resist Coater/Developer)

CLEAN TRACK ACT 12

Single Block (Resist Coater/Developer)

CLEAN TRACK ACT 12

Single Block (Polyimide Coater/Developer)

CLEAN TRACK ACT 12

Single Block (Resist Coater/Developer)

CLEAN TRACK ACT 12

Coat only Track

CLEAN TRACK ACT 12 SOD

Spin On Dielectric (SOD)

CLEAN TRACK ACT 8

Single Block (Coat/Develop)

CLEAN TRACK ACT 8

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Single Block (Coat/Develop)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

Expedius

Batch Wafer Processing

Expedius+

Batch Wafer Processing

Expedius+

Batch Wafer Processing

NEXX Apollo

Sputtering System

NEXX Apollo

Sputtering System

NS 300

Wafer Scrubber

NS 300

Wafer Scrubber

Tactras RLSA Poly

Polysilicon Etch

Tactras Vigus

Dielectric Etch

Tactras Vigus

Dielectric Etch

Tactras Vigus - Chamber Only

Dielectric Etch

Tactras Vigus - Chamber Only

Dielectric Etch

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus IRAD Oxide

Vertical LPCVD Furnace

Telius 305 DRM

Dielectric Etch

Telius 305 DRM

Dielectric Etch

Telius 305 SCCM

Dielectric Etch

Telius 305 SCCM

Dielectric Etch

Telius SP 305 DRM

Dielectric Etch

Telius SP 305 DRM

Dielectric Etch

Telius SP 305 DRM Chamber

Dielectric Etch

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN Chamber

Parts/Peripherals

Trias Ti/TiN Chamber

Parts/Peripherals

Trias Ti/TiN Chamber

Parts/Peripherals

Trias Ti/TiN Chamber

Parts/Peripherals

Trias Ti/TiN Chamber

Parts/Peripherals

Trias W

MOCVD

Trias W

MOCVD

Triase+ EX-II Plus Ti/TiN - Chamber Only

Metal CVD (Chemical Vapor Deposition)

UW200Z

Batch Wafer Processing