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Tokyo Electron Ltd.

CLEAN TRACK LITHIUS Pro

Multi Block (Resist Coater/Developer)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Telius SP-305 SCCM

Dielectric Etch

Telius 305 SCCM

Dielectric Etch

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELINDY IRAD ALD High-K

Vertical LPCVD Furnace

Trias W

MOCVD

Trias W

MOCVD

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Telius SP-305 SCCM

Dielectric Etch

Tactras Vigus

Dielectric Etch

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus ALD High-K

Vertical Furnace - Other

ALPHA-303i Anneal

Vertical Anneal Furnace

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY Plus ALD High-K

Vertical Furnace - Other

ALPHA-303i Anneal

Vertical Anneal Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY Plus Anneal

Vertical Anneal Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY Anneal

Vertical Anneal Furnace

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus

Vertical Diffusion Furnace

Trias W

MOCVD

TELINDY Plus Anneal

Vertical Anneal Furnace

Expedius

Batch Wafer Processing

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

CLEAN TRACK LITHIUS i+

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

TELFORMULA Nitride

Vertical LPCVD Furnace

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

Tactras Vigus

Dielectric Etch

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY Anneal

Vertical Anneal Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

Expedius

Batch Wafer Processing

UW200Z

Batch Wafer Processing

ALPHA-303i Anneal

Vertical Anneal Furnace

CLEAN TRACK ACT 8

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

ALPHA-303i Anneal

Vertical Anneal Furnace

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

UW300Z

Batch Wafer Processing

TELINDY Plus ALD High-K

Vertical Furnace - Other

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

TELINDY IRAD ALD High-K

Vertical LPCVD Furnace

TELINDY Oxide

Vertical LPCVD Furnace

TELINDY Plus Oxide

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY Plus Nitride

Vertical LPCVD Furnace

TELINDY Plus Nitride

Vertical LPCVD Furnace

TELINDY Anneal

Vertical Anneal Furnace

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Expedius+

Batch Wafer Processing

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

TELINDY Doped Poly

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Trias Ti/TiN Chamber

Parts/Peripherals

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Expedius+

Batch Wafer Processing

TELINDY ALD High-K

Vertical LPCVD Furnace

TELINDY ALD High-K

Vertical LPCVD Furnace

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias Ti/TiN Chamber

Parts/Peripherals

Trias Ti/TiN Chamber

Parts/Peripherals

Trias Ti/TiN Chamber

Parts/Peripherals

TELINDY

Vertical LPCVD Furnace

Parts

Parts/Peripherals

TELINDY Plus ALD High-K

Vertical Furnace - Other

CLEAN TRACK LITHIUS

Coat only Track

TELFORMULA ALD High-K

Vertical LPCVD Furnace

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

Expedius-i

Batch Wafer Processing

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus Oxide

Vertical LPCVD Furnace

NEXX Apollo

Sputtering System

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELFORMULA Nitride

Vertical LPCVD Furnace

ALPHA-303i Anneal

Vertical Anneal Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

NEXX Apollo

Sputtering System

Certas WING

Single Wafer Processing

TELFORMULA Nitride

Vertical LPCVD Furnace

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

TELFORMULA Nitride

Vertical LPCVD Furnace

ALPHA-303i Anneal

Vertical Anneal Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

TELFORMULA Nitride

Vertical LPCVD Furnace

Telius 305 SCCM

Dielectric Etch

TELFORMULA Nitride

Vertical LPCVD Furnace

Telius SP-305 SCCM

Dielectric Etch

TELINDY Plus ALD High-K

Vertical Furnace - Other

TELINDY Plus Oxide

Vertical LPCVD Furnace

TELINDY Plus Oxide

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Triase+ Ti/TiN

Metal CVD (Chemical Vapor Deposition)

TELFORMULA Nitride

Vertical LPCVD Furnace

Trias Ti/TiN Chamber

Parts/Peripherals

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Trias W

MOCVD

TELFORMULA ALD High-K

Vertical LPCVD Furnace

Tactras Vesta

Polysilicon Etch

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

TELFORMULA ALD High-K

Vertical LPCVD Furnace

CLEAN TRACK LITHIUS

Coat only Track

Triase+ EX-II Plus Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Telius SP 305 DRM

Dielectric Etch

NT333

ALD (Atomic Layer Deposition)

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Telius SP 305 DRM

Dielectric Etch