CTR Compact Thermal Reactor
Thermal Solutions
Tool selection depends on lots of factors
Process
- Film Needs
- Low Stress
- Uniform
- Conformal Coating
- Flexible Recipies
Throughput
- Small Batch Handling
- Compatible Process
- Manual / Auto Loading
- Simultaneous or single processing
Easy Installation
- Installation Options
- Through Wall
- Stackable
Diffusion/LPCVD Furnaces
Process control is essential - utilising the latest PLC controller recipies are managed easiliy and effectively
![CTR Uniformity over 200mm](/Content/images24/ctr-uniform-wafer.jpg)
Benefits of:
the smaller footprint, batch furnace solution.- Lower Overhead, Installation and Running Costs
- Scaleable Production & Process Performance
- Fully automated, recipe driven
- Small space saving footprint
- Ideal solution for pilot lines, R&D labs
![robot and belt handling for tracks](/Content/images24/CTR-Through-wall.png)
The CTR provides an exceptionally small footprint system and is stackable. Providing both atmospheric pressure and LPCVD processes, the CTR is an ideal solution for pilot lines, R&D labs, and government and university laboratories.
Typical Installations
![Small Footprint Installations](/Content/images24/CTR-6Stack.jpg)
Models:
- Model CTR-125 – processes substrates up to 125mm diameter.
- Model CTR-150 – processes substrates up to 150mm diameter.
- Model CTR-200 – extends the processing range to 200mm diameter substrates. (Processes 125mm and 156mm square substrates, too).
- Model CTR-300 – processes substrates up to 300mm diameter substrates (in development, expected late 2024).
![CTR Compact Thermal Reactor Stackable](/Content/images24/CTR-doublestack.jpg)