Tracks Coaters Spinners & Developers

Photolithography Solutions

photolithogrpahy cluster tool
Photolithography Cluster Tool
The photolithography process is used for coating and developing patterns to produce semiconductor circuits on Silicon GaAs or other substrates.

Tool selection for material dispense and removal criteria is usually based on:


  • Vapour Prime
  • Coater Station
    • Positive Resist
    • Negative Resist
  • Developer Station
  • Hot Plate
  • Chill Plate
  • Other


  • Automatic Handling
    • Belt Driven
    • Robotic Arms
  • Manual Loading
  • Simultaneous or single processing


  • Number of Pumps
  • Dispense Quantities
    • Dynamic / Moving dispense
    • Static dispense
    • Syringe Options
    • Ultrasonic Dispense
  • Other

Configured to your needs.... Multi-process, stacked hotplates etc..

Multi Cluster Tools

Photoresist processing

Manual & Semi Auto options

Photoresist processing

Scrubbers and Cleaning

Tracks are often used for automatically cleaning wafers after other processes. Placing a full cassette of wafers on one end and running them through a cleaning process gives a simple and effective solution in the production environment to remove any debris from previous process steps.

remanufactured and refurbished SVG scrubber
Remanufactured SVG Scrubber
robot and belt handling for tracks
Robotic or Belt Handling
underside of tools
Internal View of 86XX tool

Whatever your need we can provide you a system to suit. Just about every system is customised to your needs. From spinners and hotplates that fit into a wet bench to fully robotic track systems running multiple processes, we can help.

Manual Spinners & Hotplates

photoresist spinners and hotplates

Ideal for laboratory use or for putting into wet benches

Support your old SVG!

Extend lifetime of tools - remanufactured and reconfigured SVG

Extend the lifetime of your legacy SVG equipment - arrange an audit visit...

In addition to being able to supply you totally remanufactured warranted systems, configured to your needs, we can provide service and support on your installed base - often at a fraction of the cost of other companies.

svg spares and second source parts remanufactured 150mm scrubber

Service Support available

Extend the lifetime of your older tools by having an audit and regular service visit.

Wafertec Resist Pump Repair & Refurbishment

wafertech pump repair and refurbishment

Many older tools utilise Wafertec, Cybor or Millipore resist pumps - extend their lifetime by getting them serviced, repaired or refurbished.

Automatic as you need.... With remote chemical and resist dispense.

Chemical Dispense Cabinets

Chemical Dispense Cabinet

Making installation easy.