The photolithography process is used for coating and developing patterns to produce semiconductor circuits on Silicon GaAs or other substrates.
Tool selection for material dispense and removal criteria is usually based on:
- Vapour Prime
- Coater Station
- Positive Resist
- Negative Resist
- Developer Station
- Hot Plate
- Chill Plate
- Automatic Handling
- Belt Driven
- Robotic Arms
- Manual Loading
- Simultaneous or single processing
- Number of Pumps
- Dispense Quantities
- Dynamic / Moving dispense
- Static dispense
- Syringe Options
- Ultrasonic Dispense
Configured to your needs.... Multi-process, stacked hotplates etc..
Multi Cluster Tools
Manual & Semi Auto options
Scrubbers and Cleaning
Tracks are often used for automatically cleaning wafers after other processes. Placing a full cassette of wafers on one end and running them through a cleaning process gives a simple and effective solution in the production environment to remove any debris from previous process steps.
Whatever your need we can provide you a system to suit. Just about every system is customised to your needs. From spinners and hotplates that fit into a wet bench to fully robotic track systems running multiple processes, we can help.
Manual Spinners & Hotplates
Ideal for laboratory use or for putting into wet benches
Support your old SVG!
Extend the lifetime of your legacy SVG equipment - arrange an audit visit...
In addition to being able to supply you totally remanufactured warranted systems, configured to your needs, we can provide service and support on your installed base - often at a fraction of the cost of other companies.
Service Support available
Extend the lifetime of your older tools by having an audit and regular service visit.
Wafertec Resist Pump Repair & Refurbishment
Many older tools utilise Wafertec, Cybor or Millipore resist pumps - extend their lifetime by getting them serviced, repaired or refurbished.
Automatic as you need.... With remote chemical and resist dispense.
Chemical Dispense Cabinets
Making installation easy.