Wet Process - Wet benches - Acid baths - Process Baths

What is a wet bench?

In semiconductor manufacturing or other high technology industries, wet benches are fully-automated robotic process tools that carry out wet cleaning and etching operations. The wet bench can be designed for acid or solvent processing, just cleaning or any other wet chemical process.

Sequential processing of the wafers can be either manual requiring an operator to move the wafers from bath to bath, or fully robotic and automated.

In some instance, a single wafer process tool is required - these can also be supplied.

Defining a wet bench can be quite difficult so we provide on-site meetings for design and work with you every step of the way.

Single Wafer Processing

Single wafer to batch, manual to semi or even fully automatic and robotic, we can design and build the right solution for you. With years of experience, both in house and with partners, we are very familiar with all the common processes and can assist in new ones.

Spin Rinse Dryers - Vapor Drying

There are several ways to clean and dry wafers. We provide both Spin Rinse Drying or Vapor Drying

Used wet benches

Dependent on your chemistry or need, a used wet bench may be an option. We can help locate used tools and modify these or upgrade to your exact specification.

For Spin Rinse Dryers click here